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NUS ECE Yang's Group

 

Our Research Facilities

  • ALD system

  • Multi pocket e-beam/thermal deposition system

  • Multi-target sputter deposition system

  • FIB System [CICFAR]

  • 2 PLD systems, 1 PLD/ MBE

  • Ion milling/PVD system

  • Rapid thermal annealing [COE]

  • Silicon processing: 8 Inch Fab (400 sq.m Clean room)[SNDL]

  • FIB System [CICFAR]

  • Electron beam lithography [ISML]

  • Scanning Electron microscope (SEM) [ISML]

  • AFM/MFM

  • Optical microscope

  • Sub-nm (0.4nm) Helium ion microscope for imaging and lithography

  • MeV Van De Graff for Rutherford backscattering and channeling analysis

  • MeV Pelletron for RBS/Channeling and variable temperature channeling system

  • Synchrotron radiation covering spectroscopy from XRay to IR [SSLS]

  • XRD (State of the art Brucker system with 2D detector for pole plot)

  • UV-Vis Spectrophotometer

  • UV-IR Photoluminescence System [COE]

  • Solar Cell Simulator/ Evaluator

  • Fs/Ps Laser spectroscopy Labs for pump-probe measurements

  • 2 Dilution refrigerators

  • 2 He4 variable temperature transport measurement systems

  • MPMS system (SQUID)

  • PPMS

  • Multi pin probe station (pogo)

  • High frequency characterization probe station (50 GHz)